The ion pump equiped with our UHV system is 300T from GammaVacuum. It also combined with Titanium Sublimation (TSP) and heaters for baking. The heaters and the filaments of TSP may be burned out at a wrong operating condition. In the following, we just describe the replacment of the heater for IGP .


  • The schematic diagram of the heaters in IGP.If you find the measured total resistance is higher than 50ohm, part of the heaters must be damaged.



  • Disassemble the cables and measure each separated heater to determine the damaged parts.

  • Unscrew the nuts on the shield of pump and remove the magnetic shield.
  • Replace the damaged heaters.

Notes:

  • Be careful when you removing the magnetic shield, for it is very heavy and has strong magnetic.
  • If there is enough space around the ion pump, you don’t have to vent the chamber or you need to vent chamber and move out the whole pump fist…